Solberg Manufacturing | Filters, Silencers, Vacuum Filters, Oil Mist Eliminators, Separators

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WL Series

Medium to High Vacuum Filtration


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Two Stage Discharge Filter


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ACV Series

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Vacuum Trap

WL Series

Application

Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions.

Ideal for Medium-High vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system.

Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x 10-7 mb l/s (10-5 mb l/s are standard).

 

Features

- ISO-K stainless steel flanges standard

- Machined flange surface to RMS63, uncoated

- High quality vacuum service components

- Carbon steel shell w/black powder coat finish

- KF10 differential ports for accurate vacuum Δ P readings

- Machined & polished sealing surfaces on flange faces for reliable vacuum performance on all flange types

- K200 housings and larger have domed lid to minimize deflection and increase durability

 

Technical Specifications

- Rated vacuum leak rate of 1x10-5 mbar/l/sec or better (verified by helium leak test)

- Filter change out differential: 15-20" H2O over initial Δ P

- Polyester: 99%+ efficiency to 5 micron

- Paper: 99%+ efficiency to 2 micron

 

Options

- Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more

 

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WL-Series Datasheet in Metric Numbers


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