Solberg Manufacturing | Filters, Silencers, Vacuum Filters, Oil Mist Eliminators, Separators

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RX Series Extreme Filtration with Reverse Pulse Technology

(In Mono/Single crystalline PV manufacturing applications, dust and particles can overwhelm conventional inlet vacuum filters. We have a Solar Market Specific solution.)


Thank you for your interest in these products. Please contact Solberg for availability and for more information.


  • Vacuum leak rate: Typically 1x10-5mmHg (1x10-5mbar-L/sec)
  • Removable base for easy access cleaning
  • High conductance design
  • Safeguard pumps from harmful particles (SiOx, GAN, etc.)
  • Integrated support stand
  • Carbon steel or stainless steel housing construction
  • Vacuum furnaces for crystal growing, steel, titanium, etc.
  • Prevents particles from contaminating pump oil
  • Prevents build up and seizing in dry pumps
  • Vacuum coating and lamination
  • Wet & dry vacuum pump & systems
  • Compatible with most dopants
  • Backstreaming
  • Extends filter life improving maintenance intervals and process run time
  • Large liquid/slurry holding capacity
  • Integrated Reverse Pulse Technology unloads and extends filter life improving maintenance intervals and process run time.
  • Easy maintenance (removable base)
  • Face Velocity @ 20 ft/min (.10 m/sec)
  • Vacuum Rating: Medium vacuum service
  • Lower costs from unnecessary piping
  • Reduce footprint with compact design


  • Vacuum furnaces
  • Prevent particles from mixing with rotary piston lubricating oil
  • Safeguard pumps from dust particles and harmful SiO and SiO2
  • Dry screw, claw and booster vacuum pumps & systems
  • Protect the system from pump fluid or particulate backstreaming
  • Mono & single crystalline PV manufacturing
  • Metal degassing
  • Vacuum coating and lamination


  • ASME & PED rated housings
  • Valves available for semi or fully automated system operation
  • Parallel filtration system
  • Dutch Twill media: Temp (continuous): 190°C (375°F)
  • Vacuum Leak Rating: 1x10-8 mbar l/sec
  • Contact factory for model offering and availability
  • Configured and custom designs
  • PTFE media: Temp (continuous): 104°C (220°F)
  • Nonstandard finishes

Product Documents

Complete Vacuum Filtration Solutions

RX Series Datasheet - Int'l

Vacuum Filtration for Solar, Semi-Con, LED & Vacuum Coating Processes

Reverse Pulse Vacuum Filter

Product Drawings


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Models, parameters, and specifications may change without notice.

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