Solberg Manufacturing | Filters, Silencers, Vacuum Filters, Oil Mist Eliminators, Separators

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ISO Flange Vacuum Filters, CSL Series (SS ISO Fittings, Nickel Housing Finish)

ISO Flange Vacuum Filters, CSL Series (SS ISO Fittings, Nickel Housing Finish)


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ISO Flg Vacuum Filters, CSL Series (Black Finish, SS Fittings)

(Compact Inlet "L" Style Vacuum Filters with ISO-NW Flanges)

Part and Series Images 

ISO Flange Vacuum Filters, CSL Series (SS ISO Fittings, Black Finish)


MediaInletOutletStyleDim ADim BDim CDim DRated
CSL-850-K63B Paper63.0063.00ISO Flg11.506.007.686.5021029015.000 - 1 Week


  • Vacuum leak rate: Typically 1x10-5mmHg (1x10-5mbar-L/sec)
  • Stainless steel ISO flanges
  • O-ring seal
  • Seamless drawn housings
  • Temp (continuous): min -15° F ( -26° C) max 220° F (104° C)
  • Corrosive resistant carbon steel construction with powder coat finish
  • Stainless steel torsion clips for durability
  • Vacuum Rating: Medium vacuum service
  • Filter change out differential: 15-20" H2O over initial delta P
  • 99%+ removal efficiency standard Polyester: 5 microns, Paper: 2 microns
  • Prevents dry scroll tip mirgration
  • Protects against backstreaming
  • Polycrystalline silicone ingot production
  • Solar cell lamination
  • Thin-film manufacturing
  • Trap condensable vapors
  • Vacuum coating


  • Vacuum Pump-Rotary Vane
  • Vacuum Pump-Rotary Piston
  • Scroll Dry Pump
  • Vacuum Coating
  • Medical
  • Laser technology
  • Backstreaming-Protect the system from pump fluid or particulate migration
  • Prevent dry scroll tip seal migration
  • Leak Detection
  • Vacuum coating and lamination


  • Stainless steel (select models)
  • Activated Alumina, Activated Zoelite media available for foreline trap and other applications
  • Contact factory for larger sizes & ISO flanges
  • Viton seals

Product Documents

ISO Flange CSL Series, Metric

Compact ISO Flange Vacuum Filters

Product Drawings


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Models, parameters, and specifications may change without notice.

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