Medium to High Vacuum
Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system. Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x 10-5 mbar/l/s.
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