Filtration for Semiconductor Manufacturing

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Solberg is a trusted leader in the vacuum filtration market, and our goal is to protect your equipment and environment. The Semiconductor industry has many complex applications like CVD, ALD, Crystal Growing, Optical Coating, and Solar Panel Lamination, and the byproducts can harm the overall health of your vacuum equipment and your environment. Whether your process is running under a medium, high, or ultra-high vacuum, our team of specialists will review your application conditions and recommend a purpose-built solution.

 

We specialize in traditional inlet vacuum filtration and advanced technologies like reverse pulse, vapor condensing, and chemical absorption technology to maximize run time and minimize a tool-down situation. Our products can be configured and optimized to provide the ultimate protection while improving your Overall Equipment Effectiveness (OEE). 

 

Please read our blog for more information on the semconductor industry and our vacuum filtration solutions.

 

  • Overview
  • Product Documents

Typical Applications

  • Mono and Poly Crystal Growing
  • TEOS: Tetraethyl Orthosilicate
  • CVD: Chemical Vapor Deposition
  • PCVD: Plasma Chemical Vapor Deposition
  • PECVD: Plasma Enhanced Vapor Deposition
  • HDPCVD: High Density Plasma Chemical Vapor Deposition
  • MOCVD: Metal Organic Chemical Vapor Deposition 
  • APCVD: Atmospheric Pressure Chemical Vapor Deposition 
  • HVPE: Hydride Vapor Phase Epitaxy (Gallium Nitride)
  • ME: Metal Etch (Aluminum Chloride)
  • LTO: Low Temperature Oxide (Silanes and Si02)
  • Optical Coating
  • Solar Panel Lamination
  • Atomic Layer Deposition (ALD)
  • Abatement
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